Parallel Kinematic Nanopositioning Stage | P-562
Parallel kinematics for faster response times and higher multi-axis accuracy
The P-56X is part of the PIMars Parallel Kinematic multi-axis nanopositioning series which offers high precision with up to 3-axis. With capacitive sensors it offers the highest linearity of motion and measurements with subnanometer resolution without contacting. The patented PICMA® piezo actuators are all-ceramic insulated which protects them against humidity and failure resulting from an increase in leakage current. Offering up to ten times longer lifetime than conventional polymer-insulated actuators these have a proven 100 billion cycles without a single failure.
Technical data
- Travel Range – up to 340x340x340 µm
- Drive Property – Piezo Ceramics
- Load Capacity (in Z) – max 5kg (When mounted horizontally (standing on a surface, not suspended))
- Vacuum compatible – 100 % vacuum compatible and work in a wide temperature range
- Read complete specifications
Fields of application
Utilizing Flexure guides the P-56X series is free of maintenance, friction, and wear, and does not require lubrication. Combining this with a stiffness that allows for high load capacity and is insensitive to shock and vibration makes the product suitable for among other the following applications:
- Scanning microscopy
- Mask/wafer positioning
- Interferometry
- Measuring technology
- Biotechnology
- Scanning and screening
Technology Base
Other examples of stages and controller/drivers
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Get more information
Download the P-562.6CD Datasheet and either contact us or give us a call to find out more. We offer a wide variety of XY(Z) stagess and take pride in finding the best possible solution for your application!
* The P-562 is manufactured by our supplier Physic Instrumente GmbH.
