Planar Scanner with Air Bearing | A-322

XY Positioning System with 1 nm Resolution

The A-322 planar scanner has contact- and friction-free motion for the highest accuracy and reliability, drag chains, long lifetime and cleanroom compatible. Operating magnetic linear motors it has a vacuum preload and an absolute encoder and can be ordered in 3 different performance levels (Base, Plus, and Ultra).

Combine the A-322 series stage with a PIglide Motion Controller (A-81X or A-82X)


  • Travel range – up to 500 mm × 1000 mm
  • Resolution – 1 nm
  • Velocity to 2 m/s
  • Load Capacity – up to 245 N
  • Guide –Air bearing, with vacuum preload
  • Integrated Sensor – Absolute linear encoder, BiSS-C, steel measuring gauge
  • View all Specifications

*Assuming a supply pressure of 550 kPa (80 psi). For other pressure requirements please contact us


Ideally suited for scanning or high-precision positioning applications such as metrology, photonics, and precision scanning as well as in semiconductor or flat panel display manufacturing.  With its friction-free motion and no particles it is cleanroom compatible.


Other examples of Air Bearin stages and controller/drivers


Depending on the application and requirements, a variant of the A-322 series forms the ideal starting point for a tailor-made, ultraprecise solution. We offer a wide variety of XY(Z) stages and take pride in finding the best possible solution for your application! Contact us or give us a call to find out more.


Download the A-322 Datasheet

PIglide Air Bearing Technology

Air Bearings: When to Use and When to Avoid in Your Motion Application – White Paper

Learn more about our Air Bearing Stages? We are here to help!


* The A-322 is manufactured by our supplier Physic Instrumente GmbH.

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