New Air Bearing Z Tip/Tilt Stage | A-523

ULTRA-PRECISION MINITURE MULTI-AXIS SYSTEM

The A-523 is a direct drive Z tip/tilt air bearing stage that offers frictionless motion with a combination of non contact components. This results in a stage with top performance, quality and lifetime.

Combine the A-523 with a PIglide Motion Controller (A-81X or A-82X) and you will get a complete and configured system with cabling of the Z stage, applied servo tuning optimization and under applied load.

TECHNICAL DATA

  • Travel Range – 5 mm (in Z)
  • Rotation range – in θX 2° and in θY 1.6°
  • Acceleration (in Z) – 10 m/s²
  • Load Capacity (in Z) – up to 8kg
  • Drive Type – Ironless 3-phase linear motor
  • Accessories
    • Air filter sets
    • Built-in vacuum clamping mechanism
  • View all Specifications

FIELDS OF APPLICATION

Ideally suited for high-precision applications, such as wafer inspection, fiber positioning, optics positioning, flat screen inspection, maskless lithography, and ultra-LED manufacturing. The noncontact design is ideal for cleanroom applications.

TECHNOLOGY BASE

Other examples of Air Bearin stages and controller/drivers

MORE INFORMATION

We offer a wide variety of XY(Z) stages and take pride in finding the best possible solution for your application! contact us or give us a call to find out more.

 

 Download the A-523 Datasheet

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* The A-523 is manufactured by our supplier Physic Instrumente GmbH.

Pre-configured IR-Detection Modules