Rotation Stage with Air Bearing | A-63X

HIGH-PRECISION WITH LOW PROFILE MOTORIZED FRICTION FREE STAGE

The A-63X series has a brushless 3-phase torque and can with a variety of options be combined to create a solution ideal for point-to-point indexing or constant velocity scanning offering superior travel accuracy, flatness, and wobble performance.

Combine a A-63X series stage with a PIglide Motion Controller (A-81X or A-82X)

TECHNICAL DATA

• Travel range – Unlimited rotation > 360°
• Motion Platform Diamater – 150, 200, 200 or 350 mm
• Load Capacity – up to 200 N (radial) and 1200 N (axial)*
• Guide type –Air bearing, magnetic preload
• Drive Type –Torque motor, 3-phase, brushless, ironless, slotless
• Optional
  • Self-locking at rest by magnetic preload
  • Vacuum feedthrough
  • Incremental or absolute encoder
  • and more…
• View all Specifications

*Assuming a supply pressure of 550 kPa (80 psi). For other pressure requirements please contact us

FIELDS OF APPLICATION

Ideally suited for cleanroom applications, as a result of the friction-free motion and no particles, such as optical alignment, wafer inspection, wafer alignment, measuring technology, inspection systems, calibration, scanning.

TECHNOLOGY BASE

Other examples of Air Bearin stages and controller/drivers

MORE INFORMATION

We offer a wide variety of XY(Z) stages and take pride in finding the best possible solution for your application! contact us or give us a call to find out more.

* The A-63X series are manufactured by our supplier Physic Instrumente GmbH.